Integrated ethanol gas sensor and fabrication method thereof

Details Integrated ethanol gas sensor and fabrication method thereof Integrated ethanol gas sensor and fabrication method thereof

1997-12-10

2000-12-19

Williams, Hezron

Measuring and testing

Gas analysis

Detector detail

73 2331, 73 3106, 422 90, 422 94, 338 34, G01N 2700, G01N 2706, H01L 2966

Patent

active

061614211

ABSTRACT:
The present invention discloses an integrated ethanol gas sensor and fabrication thereof. The present invention utilities micro electro mechanical system (MEMS) technology and has a main sensing part in the form of a cantilever-bridge structure made of SiC thin film material arranged over a silicon substrate. The present invention integrates an SiC heater of comb or finger electrode shape and an SnO.sub.2 thin film gas sensing element applied over distinct portions on the same Si substrate together with Al2O3 and SnO2 thin films via a VLSI technology.

REFERENCES:
patent: 4343768 (1982-08-01), Kimura
patent: 4580439 (1986-04-01), Manaka
patent: 4703555 (1987-11-01), Hubner
patent: 4885929 (1989-12-01), Kasahara et al.
patent: 5019885 (1991-05-01), Yagawara et al.
patent: 5698771 (1997-12-01), Shields et al.
patent: 5767388 (1998-06-01), Fleischer et al.

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