Integrated enterprise resource planning and manufacturing...

Semiconductor device manufacturing: process – With measuring or testing

Reexamination Certificate

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Reexamination Certificate

active

06846684

ABSTRACT:
An integrated enterprise resource planning and manufacturing system which includes a middleware component, a fabrication facility coupled to the middleware component, a real time dispatcher application program interface coupled between the fabrication facility and the middleware component, a work in progress application program interface coupled between the fabrication facility and the middleware component, and an enterprise resource planning system coupled to the middleware component. The fabrication facility includes a manufacturing execution system and a real time dispatch system. The manufacturing execution system tracks overall processing of semiconductor wafers. The real time dispatch system provides near real time information regarding processing of semiconductor wafers. The real time dispatcher application program interfaces publishing information to the middleware component. The work in progress application program interface provides an interface for communicating to the fabrication facility from the middleware component. The enterprise resource planning system subscribes to information published by the real time dispatcher application program interface.

REFERENCES:
patent: 6303395 (2001-10-01), Nulman
patent: 6349341 (2002-02-01), Likes
patent: 6430572 (2002-08-01), Steffan et al.

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