Integrated emission microscope for panchromatic imaging, continu

Details Integrated emission microscope for panchromatic imaging, continu Integrated emission microscope for panchromatic imaging, continu

1995-08-04

1998-03-03

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

2503416, G01N 2171

Patent

active

057241317

ABSTRACT:
An integrated emission microscope with an emitted radiation detection system for collecting and analyzing radiation from a device under test. A semi-ellipsoidal mirror of high ellipticity directs emitted radiation from the device under test through an aperture to a radiation guide, Which transmits the radiation to spectral analyzer. The device under test may be mounted on a scanning stage. The system permits high spatial resolution selected area spectroscopic analysis, panchromatic imaging, and spectroscopic mapping of the emitted radiation from the device under test.

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Kolzer, J. et al. "Quantitative Emission Microscopy", J. Appl. Phys. 71(11) 1 Jun. 1992, pp. R23-R41.

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