Integrated electrostatic peristaltic pump method and apparatus

Details Integrated electrostatic peristaltic pump method and apparatus Integrated electrostatic peristaltic pump method and apparatus

2006-08-15

2006-08-15

Freay, Charles G. (Department: 3746)

Pumps

Processes

C417S413300, C137S607000

Reexamination Certificate

active

07090471

ABSTRACT:
An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The device also has an inlet coupled to the polymer based fluid chamber and an outlet coupled to the polymer based fluid chamber.

REFERENCES:
patent: 4581624 (1986-04-01), O'Connor
patent: 5836750 (1998-11-01), Cabuz
patent: 6033191 (2000-03-01), Kamper et al.
patent: 6062256 (2000-05-01), Miller et al.
patent: 6109889 (2000-08-01), Zengerle et al.
patent: 6116863 (2000-09-01), Ahn et al.
patent: 6124632 (2000-09-01), Lo et al.
patent: 6126140 (2000-10-01), Johnson et al.
patent: 6149123 (2000-11-01), Harris et al.
patent: 6206022 (2001-03-01), Tsai et al.
patent: 6240962 (2001-06-01), Tai et al.
patent: 6277257 (2001-08-01), Paul et al.
patent: 6408878 (2002-06-01), Unger et al.
patent: 6536213 (2003-03-01), Tai et al.
patent: 6568910 (2003-05-01), Parce
patent: 6572749 (2003-06-01), Paul et al.
patent: 6626416 (2003-09-01), Sharma et al.
patent: 6682318 (2004-01-01), Takeuchi et al.
patent: 6786708 (2004-09-01), Brown et al.
patent: 2004/0101422 (2004-05-01), Correale
Shih, J., et al., “Surface Micromachined and Integrated Capacitive Sensors For Microfluidic Applications”, Trasducers 2003, USA, pp. 388-391 (2003).
Xie, J., et al., “Integrated Surface-Micromachined Mass Flow Controller”, MEMS 2003, Kyoto, Japan, pp. 20-23 (2003).
Degani et al., On the Effect of Residual Charges on the Pull-in Parameters of Electrostatic Actuators, Sensors and Actuators A 97-98 (2002), pp. 563-568.
Dubois et al., Electrostatically Actuated Gas Microvalve Based on A Ta—Si—N Membrane, Institute of Microtechnology, University of Nuchatel, Switzerland, 2001, pp. 535-538.
Galambos et al., A Surface Micromachined Electrostatic Drop Ejector, Transducers 2001, Munich, Germany.
Grosjean et al., A Thermopneumatic Peristaltic Micropump Transducers, 1999, pp. 1776-1779.
Judy et al., Micromechanical Membrane Pump, MEMS 1991, pp. 182-186.
Kovacs, G.T.A., Micro Machined Transducers Sourcebook, McGraw-Hill, 1998.
Sethu et al., Polymer Based Actuator for Nozzle-Diffuser Pumps In Plastic Microfluidic Systems, 2002, pp. 232-328.
Tsai et al., A Thermal Bubble Actuated Micro Nozzle-Diffuser Pump, MEMS 2001, pp. 409-412.
Wu et al., Electrochemical Time of Flight Flow Sensor, Sensors and Actuators, A 97-98 (2002), pp. 68-74.
Vandelli et al., Development of a MEMS Microvalve Array for Fluid Flow Control, Journal of Microelectromechanical Systems, vol. 7, No. 4, Dec. 1998, pp. 395-403.
Wijngaart et al., A High-Storke, High-Pressure Electrostatic Actuator for Valve Applications, Sensors and Actuators, A 100 (2002), pp. 264-271.
Yao et al., Dielectric Charging Effects on Parylene Electrostatic Actuators, IEEE, 2002, pp. 614-617.

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