Integrated electrically operable normally closed valve

Details Integrated electrically operable normally closed valve Integrated electrically operable normally closed valve

1996-09-27

1999-02-02

Lee, Kevin

Valves and valve actuation

Heat or buoyancy motor actuated

338 23, F16K 2700

Patent

active

058654178

ABSTRACT:
A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second die. The cavity has a resistor formed therein through which current is driven to cause the pressure to rise and the flexible membrane to flex. Movement of membrane is used to drive a valve element to a position where it unblocks a port to open the valve. This genus includes species such as ultra clean embodiments where a containment barrier keeps ultra clean processing gases confined to a wetted area having materials and bonding agents selected so as to be chemically compatible with the materials and conditions in the wetted area. Low leak species include a compliant material for a valve seat which is deformed by a ridge surrounding a port in the closed position. It is this port which is blocked and unblocked by movement of the valve element to close and open the valve.

REFERENCES:
patent: 3856259 (1974-12-01), Doherty, Jr.
patent: 4821997 (1989-04-01), Zdeblick
patent: 4943032 (1990-07-01), Zdeblick
patent: 5029805 (1991-07-01), Albarda et al.
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5323999 (1994-06-01), Bonne et al.
Redwood MicroSystems brochure Introducting the Flow-istor.TM. Flow Regulator from Redwood MicroSystems, 1996.

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