Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1984-11-29
1986-03-11
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
73727, 338 4, 338 42, G01L 906
Patent
active
045746400
ABSTRACT:
A pressure transducing device in the form of a beam includes a monolithic chip of silicon or similar material which is mechanically supported at and near its two opposed ends and unsupported in a flexible region between the two ends. The flexible, unsupported region is one of maximized sensitivity to stresses produced by deflection or flexing of the beam due to, e.g., a differential pressure applied across it. An integral, pressure-responsive diaphragm is formed in the supported area of the chip near one of its mechanically-supported ends. This area of the chip is relatively insensitive to stresses produced by beam flexing or deflection; rather, it responds to stresses produced by a pressure (e.g., a static pressure) applied directly to its surface. A first set of strain gauges is provided in the flexible chip region, and a second set on the surface of the integral diaphragm. Thus, a single transducing element is formed which provides separate output signals simultaneously indicative of both differential and static pressures experienced by, respectively, the unsupported chip region and the surface of the integral diaphragm.
REFERENCES:
patent: 2979680 (1961-04-01), Bean, Jr.
patent: 3088323 (1963-05-01), Welkowitz et al.
patent: 3484732 (1969-12-01), Postma
patent: 4222277 (1980-09-01), Kurtz et al.
patent: 4322980 (1982-04-01), Suzuki et al.
patent: 4395915 (1983-08-01), Singh
Becker William G.
Bourns Instruments, Inc.
Klein Howard J.
Woodiel Donald O.
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