Integrated driver process flow

Details Integrated driver process flow Integrated driver process flow

2007-10-30

2007-10-30

Tsai, H. Jey (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C438S052000, C438S053000, C257SE21487

Reexamination Certificate

active

10720498

ABSTRACT:
An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmit the processed control signals to the MEMS structure. Methods of fabricating integrated devices are also disclosed.

REFERENCES:
patent: 4571661 (1986-02-01), Hoshino
patent: 5814554 (1998-09-01), De Samber et al.
patent: 6430109 (2002-08-01), Khuri-Yakub et al.
patent: 6448622 (2002-09-01), Franke et al.
patent: 6773401 (2004-08-01), Dreschel et al.
patent: 6884636 (2005-04-01), Fiorini et al.

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