Integrated driver process flow

Details Integrated driver process flow Integrated driver process flow

2005-11-22

2005-11-22

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S237000, C359S224200

Reexamination Certificate

active

06967760

ABSTRACT:
An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.

REFERENCES:
patent: 5808797 (1998-09-01), Bloom et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6569717 (2003-05-01), Murade
patent: 6798550 (2004-09-01), Wang et al.
patent: 2002/0057486 (2002-05-01), Tanaka

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