Integrated displacement sensors for probe microscopy and...

Details Integrated displacement sensors for probe microscopy and... Integrated displacement sensors for probe microscopy and...

2006-06-29

2009-12-29

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07637149

ABSTRACT:
In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.

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