Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Patent
1997-12-31
1999-11-09
Abraham, Fetsum
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
25022719, 250306, 250307, 2504911, 2504421, 25044211, G01B 528
Patent
active
059820098
ABSTRACT:
An integrated device having a configuration, in which a cantilever and a light source are integrated on a single substrate, and applicable to a variety of fields, for example, ultra-fine quantity sensors, and a method for fabricating such a device. The light source such as LED, LD or SEL and the cantilever are integrated together on a single substrate in such a manner that they are arranged in proximity because the distance between the light source to the cantilever has no influence on the amplification rate. Accordingly, the device of the present invention requires no additional alignment for its constituting elements. In accordance with this configuration, it is possible to greatly reduce the space occupied by the constituting elements. It is also possible to reduce the limitation on the focusing of light. Since the integrated device of the present invention can accurately measure a micro displacement of the cantilever, it can be applied to micro physical quantity sensors. The device can also be used to measure displacement of a SPM tip. In addition, the device of the present invention may be used to achieve an alignment required in optical devices and LD's.
REFERENCES:
patent: 5260567 (1993-11-01), Kuroda et al.
patent: 5493177 (1996-02-01), Muller et al.
patent: 5596194 (1997-01-01), Kubena et al.
patent: 5883387 (1999-03-01), Matsuyama et al.
Hong Song-cheol
Jeon Sookun
Abraham Fetsum
Korea Advanced Institute of Science & Technology
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