Integrated delivery system for chemical vapor from non-gaseous s

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

118715, 118725, 392400, 392401, 392403, C23C 1600

Patent

active

052521346

ABSTRACT:
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

REFERENCES:
patent: 4436674 (1984-03-01), McMenamin
patent: 4488506 (1984-12-01), Heinecke
patent: 4545801 (1985-10-01), Miyajiri
patent: 4619844 (1986-10-01), Pierce

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Integrated delivery system for chemical vapor from non-gaseous s does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated delivery system for chemical vapor from non-gaseous s, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated delivery system for chemical vapor from non-gaseous s will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1901368

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.