Integrated delivery system for chemical vapor from non-gaseous s

Details Integrated delivery system for chemical vapor from non-gaseous s Integrated delivery system for chemical vapor from non-gaseous s

1993-07-02

1997-12-16

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

392400, 392401, 392403, C23C 1600

Patent

active

056980370

ABSTRACT:
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

REFERENCES:
patent: 4436674 (1984-03-01), McMenamin
patent: 4488506 (1984-12-01), Heinecke
patent: 4545801 (1985-10-01), Miyajiri
patent: 4572943 (1986-02-01), Hogfeldt
patent: 4583372 (1986-04-01), Egan et al.
patent: 4619844 (1986-10-01), Pierce
patent: 4640221 (1987-02-01), Barbee et al.

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