Integrated coupled resonator filter and bulk acoustic wave...

Details Integrated coupled resonator filter and bulk acoustic wave... Integrated coupled resonator filter and bulk acoustic wave...

2007-05-31

2010-11-02

Tan, Vibol (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S133000

Reexamination Certificate

active

07825749

ABSTRACT:
A method for manufacturing a filter device is provided. The filter device comprises a coupled resonator at a first site, a shunt resonator at a second site and a series resonator at a third site, the coupled resonator comprising a first and a second resonator. The method comprising a step of providing a substrate with a piezoelectric layer sandwiched between a first electrode and a first part of a second electrode at the first site and the second site, the piezoelectric layer sandwiched between the first electrode and a second part of the second electrode at the third site. The method further comprising the step of forming a coupling layer on the second electrode, the step of forming a further piezoelectric layer sandwiched between a further first electrode and a further second electrode at the third site and the step of removing the coupling layer at the second and third sites.

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