Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-03-06
2007-03-06
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200
Reexamination Certificate
active
10631087
ABSTRACT:
A novel spatial light modulator system has a high fill factor MEMS array of tilting mirrors used to attenuate wavelength channels in an optical network and an interface control circuit controlling the tilting mirror array via received control signals. The control signals include definitions of the wavelength channels and desired attenuation. This control circuit may or may not be on the same chip as the mirror array. Each mirror is supported by one or more flexures, located symmetrically or asymmetrically with respect to the mirror's center of gravity, providing single-axis or two-axis rotation. Stiffener ribs at mirror edges provide a flatter mirror. Landing electrodes held at the same potential as the mirror prevent stiction, while strain relief slots relieve stress on the mirror or flexures. Mirrors fabricated from polysilicon or metal are polished flat using a CMP technique. This SLM design is non-interferometric, therefore increased angular tilt provides increased attenuation.
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“Digitally controlledfault-tolerant multiwavelength programmable fiber-opticattenuator using a two-dimensional digital micromirror device”. Optics Letters, vol. 24, Issue 5, pp. 282-284, Mar. 1999.
Bernstein Jonathan Jay
Dokmeci Mehmet Remzi
Beall Thomas R.
Choi William
Corning Incorporated
Mack Ricky
Pappas Joanne N.
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