Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-12-30
2009-08-04
DeCady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S086000, C700S097000, C700S121000
Reexamination Certificate
active
07571019
ABSTRACT:
According to embodiments of the invention, an integrated configuration, flow and execution systems (ICFES) may be used to specify, control and record a history of processing of both semiconductor device experimental lots and production lots of wafers. Moreover, the system allows combining of one or more partial flows of pre-existing flow blocks, and special processing into another processing flow block. A lot plan can be created that includes the flow block, and the lot plan can be updated to include partial flows and special processing before or during processing of the lot plan.
REFERENCES:
patent: 5980591 (1999-11-01), Akimoto et al.
patent: 6772035 (2004-08-01), Mouli
patent: 6912439 (2005-06-01), Mouli
patent: 2001/0034562 (2001-10-01), Aumer et al.
patent: 2003/0036971 (2003-02-01), Tanabe
patent: 2003/0216827 (2003-11-01), Mouli
patent: 2004/0220693 (2004-11-01), Mouli
patent: 2005/0039161 (2005-02-01), Pfander et al.
patent: 2005/0209865 (2005-09-01), Doss et al.
patent: 2005/0267622 (2005-12-01), Mouli
patent: 2006/0079983 (2006-04-01), Willis
U.S. Appl. No. 11/312,131, “Mechanism for Execution of Global Flow Changes in a Manufacturing System,” Charles H. Winstead et al., filed Dec. 20, 2005.
Intel Corporation, PCT Notification of Transmittal of International Search Report and the Written Opinion of hte International Searching Authority, or the Delcaration, U.S. Appl. No. PCT/US2006/047492, filed Dec. 11, 2006.
International Preliminary Report for PCT Appl. No. PCT/US2006/047491 dated Jul. 10, 2008 (6 pages).
Mouli Chandra
Qu Jiang
Sankaran Rajshree P.
Taha Samer M.
Winstead Charles H.
Blakely , Sokoloff, Taylor & Zafman LLP
DeCady Albert
Intel Corporation
Kasenge Charles R
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