Integrated configuration, flow and execution system for...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S086000, C700S097000, C700S121000

Reexamination Certificate

active

07571019

ABSTRACT:
According to embodiments of the invention, an integrated configuration, flow and execution systems (ICFES) may be used to specify, control and record a history of processing of both semiconductor device experimental lots and production lots of wafers. Moreover, the system allows combining of one or more partial flows of pre-existing flow blocks, and special processing into another processing flow block. A lot plan can be created that includes the flow block, and the lot plan can be updated to include partial flows and special processing before or during processing of the lot plan.

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