Integrated circuits

Details Integrated circuits Integrated circuits

1982-09-30

1985-08-13

Albritton, C. L.

Electric heating

Metal heating

By arc

148 15, 357 50, B23K 2600

Patent

active

045352208

ABSTRACT:
An integrated circuit comprises a substrate having a plurality of components electrically isolated by regions of amorphous material formed by laser irradiation. Typically the laser radiation has a wavelength less than 400 nm a pulse length between 0.1 and 10 .mu.sec, and a power density between 0.1 and 0.8 J/cm.sup.2. The substrate material may be Si, Ge, GaAs, GaAlAs, InAs, InP, InAlP.

REFERENCES:
patent: 3615317 (1971-10-01), Jagodzmski
patent: 4058699 (1977-11-01), Von Vloten
patent: 4240843 (1980-12-01), Celler et al.
patent: 4322253 (1982-03-01), Pankove et al.
patent: 4338616 (1982-07-01), Bol
patent: 4370175 (1983-01-01), Levatter

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