Integrated circuit with a MOS capacitor

Details Integrated circuit with a MOS capacitor Integrated circuit with a MOS capacitor

2006-05-09

2006-05-09

Pham, Hoai (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S532000

Reexamination Certificate

active

07042064

ABSTRACT:
The present invention relates to an integrated circuit having a MOS capacitor. In one embodiment, a method of forming an integrated circuit comprises forming an oxide layer on a surface of a substrate, the substrate having a plurality of isolation islands. Each isolation island is used in forming a semiconductor device. Patterning the oxide layer to expose predetermined areas of the surface of the substrate. Depositing a nitride layer overlaying the oxide layer and the exposed surface areas of the substrate. Implanting ions through the nitride layer, wherein the nitride layer is an implant screen for the implanted ions. Using the nitride layer as a capacitor dielectric in forming a capacitor. In addition, performing a dry etch to form contact openings that extend through the layer of nitride and through the layer of oxide to access selected device regions formed in the substrate.

REFERENCES:
patent: 4296429 (1981-10-01), Schroeder
patent: 5411911 (1995-05-01), Ikeda et al.
patent: 5414291 (1995-05-01), Miwa et al.
patent: 5525529 (1996-06-01), Guldi
patent: 5792681 (1998-08-01), Chang et al.
patent: 6228736 (2001-05-01), Lee et al.
patent: 6258678 (2001-07-01), Liaw
patent: 6265755 (2001-07-01), Shinohara
patent: 6468858 (2002-10-01), Lou

Affiliated with

Also associated with

Rating

Integrated circuit with a MOS capacitor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated circuit with a MOS capacitor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated circuit with a MOS capacitor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3645891