Integrated circuit wafer transport mechanism

Details Integrated circuit wafer transport mechanism Integrated circuit wafer transport mechanism

1982-02-26

1984-01-24

Spar, Robert J.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

211 41, 269 56, 269229, 269903, 350530, 414268, 414609, 414750, G01N 2101, G01N 3500

Patent

active

044273320

ABSTRACT:
A manually operable mechanism for attachment to the adjustable stage of an inspection microscope for lifting a selected printed circuit wafer from its slot in a conventional disc holder and positioning it under the microscope lens for inspection. After inspection the mechanism is operated to lift the wafer from its inspection position, to transport it back into the disc holder, and carefully lower it into its correct slot. There is no manual handling of the wafers and therefore the normal losses resulting from breakage and contamination is eliminated.

REFERENCES:
patent: 3516386 (1970-06-01), Landwehr et al.
patent: 3902615 (1975-09-01), Levy et al.
patent: 4030622 (1977-06-01), Brooks et al.
patent: 4203696 (1980-05-01), Lindberg

Affiliated with

Also associated with

Rating

Integrated circuit wafer transport mechanism does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated circuit wafer transport mechanism, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated circuit wafer transport mechanism will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1284893