Integrated circuit trench resistor

Details Integrated circuit trench resistor Integrated circuit trench resistor

1989-03-30

1990-10-09

Reynolds, Bruce A.

Electrical resistors

With base extending along resistance element

338307, 338309, 338314, 427101, 296101, H01C 1012

Patent

active

049623656

ABSTRACT:
A resistor (10) includes a resistive filling (28) formed within a trench (12) and separated therefrom by an insulating layer (26). Resistive filling (28) is of the same type of semiconductor material as that of second layer (22), but of an opposite extreme of dopant concentration. A head region (32) may be formed below interface (30) within second layer (22) to more clearly delineate the edge of resistive filling (28) from second layer (22). Where resistive filling (28) is of a low dopant concentration, low resistance contact region (34) is formed of a high dopant concentration in order to provide a minimum resistance contact to resistive filling (28).

REFERENCES:
patent: 4728623 (1988-03-01), Lu et al.
patent: 4782030 (1988-11-01), Katsumata et al.

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