Integrated circuit toroidal inductor

Details Integrated circuit toroidal inductor Integrated circuit toroidal inductor

1996-08-23

1998-08-11

Gellner, Michael L.

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

336219, 336223, 336229, H01F 500, H01F 2724, H01F 2728

Patent

active

057932727

ABSTRACT:
High quality factor (Q) spiral and toroidal inductor and transformer are disclosed that are compatible with silicon very large scale integration (VLSI) processing, consume a small IC area, and operate at high frequencies. The spiral inductor has a spiral metal coil deposited in a trench formed in at dielectric layer over a substrate. The metal coil is enclosed in ferromagnetic liner and cap layers, and is connected to an underpass contact through a metal filled via in the dielectric layer. The spiral inductor also includes ferromagnetic cores lines surrounded by the metal spiral coil. A spiral transformer is formed by vertically stacking two spiral inductors, or placing them side-by-side over a ferromagnetic bridge formed below the metal coils and cores lines. The toroidal inductor includes a toroidal metal coil with a core having ferromagnetic strips. The toroidal metal coil is segmented into two coils each having a pair of ports to form a toroidal transformer.

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