Integrated circuit tester using ion beam

Details Integrated circuit tester using ion beam Integrated circuit tester using ion beam

1997-04-25

1999-07-27

Brown, Glenn W.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324765, G01R 3126, G01R 31305

Patent

active

059296453

ABSTRACT:
Testing an Integrated circuit (420) for performance during exposure to an ion beam. Ion beams of atoms with atomic weights in the range of 6 to 20 impinging on an integrated circuit simulate the effects of cosmic ray neutrons interacting with silicon atoms of the integrated circuit.

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patent: 5089774 (1992-02-01), Nakano
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patent: 5592099 (1997-01-01), Kuribara et al.
patent: 5747803 (1998-05-01), Doong
patent: 5757198 (1998-05-01), Shida et al.
patent: 5804980 (1998-09-01), Nikawa

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