Integrated circuit tester information processing system for...

Details Integrated circuit tester information processing system for... Integrated circuit tester information processing system for...

2007-10-15

2009-12-08

Raymond, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Testing system

For transfer function determination

C702S064000, C702S065000, C702S188000, C438S197000, C438S199000, C716S030000, C716S030000

Reexamination Certificate

active

07630850

ABSTRACT:
A method for operating an integrated circuit tester information processing system includes: measuring current information from test structures for an integrated circuit having a stress liner; forming a transfer curve by simulating based on the current information with a first range of first mobility multipliers; forming an inverse transfer curve by applying an inverse transfer function to the transfer curve; forming a stress curve with second mobility multipliers from the inverse curve; and validating the second mobility multipliers by comparing a measured curve and a simulated curve with the measured curve based on the current information and the simulated curve based on stress curve.

REFERENCES:
patent: 7101744 (2006-09-01), Dyer et al.
patent: 7442601 (2008-10-01), Pei et al.
patent: 2004/0149045 (2004-08-01), Johnson et al.
patent: 2007/0028195 (2007-02-01), Chidambarrao et al.
C.D. Sheraw et al., Dual Stress Liner Enhancement in Hybrid Orientation Technology, 2005 Symposium on VLSI Technology Digest of Technical Papers, pp. 12-13.

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