Integrated circuit tester information processing system

Details Integrated circuit tester information processing system Integrated circuit tester information processing system

2007-09-18

2009-10-27

Raymond, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Electrical signal parameter measurement system

C257S274000

Reexamination Certificate

active

07610160

ABSTRACT:
A method for operating an integrated circuit tester information processing system includes measuring current information from test structures for an integrated circuit having dual stress liners; selecting currents from the current information or stored current information; deriving a scaling factor with the currents for a stress contribution based on an active area of a circuit element in the integrated circuit; and correlating the stress contribution with the integrated circuit.

REFERENCES:
patent: 7101744 (2006-09-01), Dyer et al.
patent: 2004/0149045 (2004-08-01), Johnson et al.
patent: 2007/0028195 (2007-02-01), Chidambarrao et al.
patent: 2009/0099829 (2009-04-01), Topaloglu et al.
patent: 2009/0113368 (2009-04-01), Lin et al.
C.D. Sheraw et al., Dual Stress Liner Enhancement in Hybrid Orientation Technology, 2005 Symposium on VLSI Technology Digest of Technical Papers, pp. 12-13.

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