Integrated circuit system with clean surfaces

Details Integrated circuit system with clean surfaces Integrated circuit system with clean surfaces

2011-06-28

2011-06-28

Norton, Nadine (Department: 1713)

Coating processes

With pretreatment of the base

Etching, swelling, or dissolving out part of the base

C427S299000, C427S314000, C134S026000, C134S028000

Reexamination Certificate

active

07968148

ABSTRACT:
An integrated circuit system includes providing an integrated circuit wafer; applying a first cleaning solution over the integrated circuit wafer; and applying a second cleaning solution over the integrated circuit wafer to prevent or remove a defect resulting from the first cleaning process.

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