Inductor devices – Coil or coil turn supports or spacers – Printed circuit-type coil
Patent
1997-10-14
2000-09-05
Gellner, Michael L.
Inductor devices
Coil or coil turn supports or spacers
Printed circuit-type coil
336223, 336232, H01F 500
Patent
active
061149373
ABSTRACT:
High quality factor (Q) spiral and toroidal inductor and transformer are disclosed that are compatible with silicon very large scale integration (VLSI) processing, consume a small IC area, and operate at high frequencies. The spiral inductor has a spiral metal coil deposited in a trench formed in a dielectric layer over a substrate. The metal coil is enclosed in ferromagnetic liner and cap layers, and is connected to an underpass contact through a metal filled via in the dielectric layer. The spiral inductor also includes ferromagnetic cores lines surrounded by the metal spiral coil. A spiral transformer is formed by vertically stacking two spiral inductors, or placing them side-by-side over a ferromagnetic bridge formed below the metal coils and cores lines. The toroidal inductor includes a toroidal metal coil with a core having ferromagnetic strips. The toroidal metal coil is segmented into two coils each having a pair of ports to form a toroidal transformer.
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Ahn et al, "A Fully Integrated Planar Toroidal Inductor with a Micromachined Nicket-Iron Magnetic Bar", IEEE Transaction on components, packaging, and manufacturing technology-Part A, vol. 17, No. 3, Sep. 1994.
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Surganov, "Planarized thin film inductors and capacitors for hybrid integrated circuits made of aluminum and anodic alumina", IEEE Transaction on components, packaging and manufacturing technology, May 1994.
Burghartz Joachim Norbert
Edelstein Daniel Charles
Jahnes Christopher Vincent
Uzoh Cyprian Emeka
Gellner Michael L.
International Business Machines - Corporation
Mai Anh
Trepp, Esq. Robert M.
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