Integrated circuit sensor and detector and spectrometers incorpo

Details Integrated circuit sensor and detector and spectrometers incorpo Integrated circuit sensor and detector and spectrometers incorpo

1992-01-16

1994-03-22

Strecker, Gerard R.

Electricity: measuring and testing

Electrostatic field

324 72, 324109, G01R 2912, G01R 528, H01J 4902, G01T 128

Patent

active

052968162

DESCRIPTION:

BRIEF SUMMARY
This invention relates to single and multiple channel charge sensors fabricated in the form of integrated circuits and to various types of spectrometers incorporating them.
Scanning type dispersive spectrometers are limited in efficiency because only a small proportion of the signal representing the complete spectrum of a sample is recorded on a single channel detector at any given moment during the scan. It is known that efficiency can be increased by the use of a multiple channel detector which can register at least a significant part of the spectrum simultaneously. In the case of a charged particle spectrometer, e.g., a mass or electron energy spectrometer, prior multichannel detectors typically comprise one or more channel plate electron multipliers which receive the charged particles comprising the spectrum to be recorded and produce an intensified electron image therefrom. A multiple channel charge sensor then converts the electron image into electrical signals which can be processed by a computer. Several different types of charge sensors have been employed, for example a phosphor screen on which charged particles impact to produce photons, connected by a fibre optical link to an optical detector system such as a television camera, photodiode or CCD array with appropriate electronics. Another type of charge sensor comprises a multianode array with individual charge sensitive amplifiers for each anode. Position sensitive detectors such as resistive strip or wedge and strip detectors are also used, particularly in the case of electron energy spectrometers, but because they can record the position of only one event at a time they are of limited use in most spectrometric applications.
Unfortunately the performance requirements of a multiple channel detector suitable for charged-particle spectrometers are very demanding. This is especially true of high resolution mass spectrometers which require a large number of closely spaced channels if both the mass range and resolution are to be maintained. Further, the sensitivity advantage of multiple channel detectors is only useful if the speed of the detector and of its associated electronics is sufficiently great. Prior types of detectors have up to now failed to provide a cost-effective improvement to the performance of good quality single channel detector mass spectrometers.
Of the presently available charge detecting systems, the multianode array appears to offer the best prospects of adequate performance because it is capable of true simultaneous detection with a short dead time and with a resolution determined only by the spacing of the anodes. However, the practical problems of producing an array of a sufficient number of anodes (several thousand are necessary for a high resolution mass spectrometer) and the associated electronics, are very great. Each anode requires its own charge sensing circuit and the provision of a thousand external amplifiers and the associated wiring is impractical. It is obvious, however, that the problem could be solved in principle by the use of an integrated circuit which comprised at least the anodes and the associated charge sensors and a data acquisition circuit for multiplexing the outputs of the charge sensors to a reasonable number of external connections.
Multianode detectors comprising a relatively small number of anodes and external charge sensors and which are suitable for use with channel plate electron multipliers have been realised by Padmore (Nucl. Instrum. and Meth. in Physics Research 1988 vol A270(2-3) pp 582-9), Gurney, Ho, Richter and Villarrubia (Rev. Sci. Instrum. 1988 vol 59(1) pp 22-44), Timothy and Bybee (Proc. SPIE 1981 vol 265 pp 93-105 and Applied Optics 1975 vol 14 (7) pp 1632-44) and Liptak, Sandie, Shelley and Simpson (IEEE Trans. Nucl. Sci. 1984 NS-31(1) pp 780-785). However, arrays of more than 500 anodes have only been realised by the use of coincidence arrays which involve the use of 2 sets of electrodes for coarse and fine positioning respectively. These are unsuitable for most spectroscopic

REFERENCES:
Padmore, et al, "A Fast Multianode Detector for Solid State Ultraviolet Photoelectron Spectroscopy" Nucl Instrum. Meth. in Phys. Res. 1988 vol. A270(2-3) pp. 582-589.
Gurney, Ho, Richter et al, "Multidetector Electron Energy-Loss Spectrometer for Time-Resolved Surface Studies" Rev. Sci. Instrum. 1988 vol. 59 (1) pp. 22-44.
Timothy, Bybee, "Multianode Microchannel Array Detectors for Space Shuttle Imaging Applications" Proc. SPIE, 1981 vol. 265 pp. 93-105.
Timothy, Bybee, "One-Dimensional Photon-Counting Detector Array for Use at Euv and Soft X-Ray Wavelengths" Appld. Optics. 1975 vol. 14 (7) pp. 1632-1644.
Liptak, Sandie, et al, "Microchannel Plate Electron Multiplier for Mass Spectrometer Applications" IEEE Trans. Nucl. Sci. 1984 vol. NS-31 (1) pp. 780-785.
Krider et al, "A Multiwire Secondary Emission Beam Profile Monitor with 20 IM Resolution" Nucl Instum. Meth. in Phys. Res. 1986 vol. A247 (2) pp. 304-308.
Tobita et al, "Absolute Detection Efficiency of a Microchannel-Plate Detector for Ions and Neutrals" Japan J. Appld. Phys. pt. 1, 1987 vol. 26 (3) pp. 509-510.
Hatfield, York, Comer, Hicks, "Development of a New Type of Self-Scanned Electron Image Sensing Integrated Circuit" IEEE J. Solid State Circuites, 1989 vol. 24 (3), pp. 704-710.
Walker, Parker, Hyams, Shapiro, "Development of High Density Readout for Silicon Strip Detectors" Nucl Instrum. Meth. Phys. Res. 1984 vol. 226 pp. 200-203.
Boettcher, Donat, Leiste et al., "Performance of Silicon Strip Detectors with 50 and 100 IM Strip Distance" Nucl Instrum. Meth. Phys. Res. 1984 vol. 226 pp. 72-77.
Zimmer, "Technology for the Compatible Integration of Silicon Detectors with Readout Electronics" Nucl Instrum. Meth. Phys. Res. 1984 vol. 226 pp. 175-184.
Jarron, Goyot, "A Fast Current Sensitive Preamplifier (MSD2) for the Silicon Microstrip Detector" Nucl Instrum. Meth. in Phys. Res. 1984 vol. 226 pp. 156-162.
Gatti, Manfredi, "Present Trends and Realisations in Readout Electronics for Semiconductor Detectors in High Energy Physics" Nucl Instrum. Meth. in Phys. Res. 1984 vol. 226 pp. 142-155.
Heijine, Higon, Jarron et al., "Development of Hardware Around a Silicon Microstrip Detector with 512 Elements" Nucl Instrum. Meth. in Phys. Res. 1984 vol. 226 pp. 63-67.
Hofman, Lutz, Hosticka et al. "Development of Readout Electronics for Monolithic Integration with Diode Strip Detectors" Nucl Instrum. Meth. in Phys. Res. 1984 vol. 226 pp. 196-199.
Hosticka, "Prospects of VLSI Readout" Nucl Instrum. Meth. in Phys. Res. 1984 vol. 226 pp. 185-189.
Radeka, "Semiconductor Position-Sensitive Detectors" Nucl Instrum. Meth. in Phys. Res. 1984 vol. 226 pp. 209-218.
Epperson, Sweedler, Bonner Denton et al. "Electro-Optical Characterization of the Tektronix TK512M-011 Charge-Coupled Device" Opt. Eng. 1987 vol. 26 (8) pp. 715-724.
Hicks, Wallbank, Bury, Comer, "A Multidetector System for Electron Spectrometers" Proc. Confr. Influence of Microelect. on Meas. Instrum. and Transducer Design, London, 1982 (IEEE) pp. 167-174.

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