Semiconductor device manufacturing: process – Making passive device – Resistor
Reexamination Certificate
2007-04-03
2007-04-03
Owens, Douglas W. (Department: 2811)
Semiconductor device manufacturing: process
Making passive device
Resistor
C438S384000, C438S171000, C438S190000, C257S533000, C257S534000, C257S536000, C257S537000, C257S538000, C257S516000, C257S350000, C257S351000, C257S528000, C257S622000, C338S195000, C338S309000, C338S331000
Reexamination Certificate
active
10917935
ABSTRACT:
An integrated circuit resistor is provided that comprises a mesa14between electrical contacts16and18. The electrical resistance between electrical contacts16and18is selectively increased through the formation of recesses20and22in the mesa14. The size of recesses20and22can be used to tune the value of the electrical resistance between contacts16and18.
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Heston David D.
Mooney Jon E.
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