Integrated circuit processing utilizing microwave radiation

Details Integrated circuit processing utilizing microwave radiation Integrated circuit processing utilizing microwave radiation

1995-12-22

2000-06-20

Leung, Philip H.

Electric heating

Microwave heating

With heat exchange

219678, 219686, 146DIG71, 438676, 438729, H05B 680

Patent

active

060780355

ABSTRACT:
Microwave radiation, perhaps with microwave absorbing materials, is utilized to provide heating of partially formed integrated circuits in a variety of circumstances.

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patent: 4490183 (1984-12-01), Scovell
patent: 4517026 (1985-05-01), Inoue
patent: 4593168 (1986-06-01), Amada
patent: 4749615 (1988-06-01), Bonny et al.
patent: 5189273 (1993-02-01), Inukai et al.
patent: 5417494 (1995-05-01), Kempa et al.
patent: 5432325 (1995-07-01), Katz et al.
patent: 5519193 (1996-05-01), Freiermuth et al.
patent: 5707466 (1998-01-01), Atwater et al.

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