Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent
1987-10-29
1990-10-30
Werner, Frank E.
Material or article handling
Apparatus for moving intersupporting articles into, within,...
Stack forming apparatus
118719, 118500, 414217, 414416, 414222, 4147448, 414331, B65G 4905
Patent
active
049665197
ABSTRACT:
A vacuum-tight wafer carrier, and a load lock suitable for use with this wafer carrier. The wafers are supported at each side by a slightly sloping shelf, so that minimal contact (line contact) is made between the wafer surface and the surface of the shelf. This reduces generation of particulates by abrasion of the surface of the wafer. The carrier also contains elastic elements to restrain the wafers from rattling around, which further reduces the internal generation of particulates. When the wafer carrier is placed into the load lock, its body is lowered from beneath its cover through an aperture into a lower chamber, where wafers are loaded and unloaded under vacuum; the carrier cover remains covering the aperture into the lower chamber, so that the wafers never see any surface which is directly exposed to atmosphere. A wafer transport arm mechanism permits interchange of wafers among one or more processing stations and one or more load locks of this type.
REFERENCES:
patent: 4047624 (1977-09-01), Dorenbos
patent: 4178113 (1979-12-01), Beaver, II et al.
patent: 4338883 (1982-02-01), Mahler
patent: 4483651 (1984-11-01), Nakane et al.
patent: 4532816 (1985-08-01), Miller
patent: 4546897 (1985-10-01), Maloy et al.
patent: 4584045 (1986-04-01), Richards
patent: 4604020 (1986-08-01), Toro Lira et al.
patent: 4605469 (1986-08-01), Shih et al.
patent: 4616683 (1986-10-01), Tullis et al.
patent: 4632624 (1986-12-01), Mirkovich et al.
patent: 4636128 (1987-01-01), Millis et al.
patent: 4664578 (1987-05-01), Kakehi
patent: 4668484 (1987-05-01), Elliott
patent: 4682927 (1987-07-01), Southworth et al.
Bowling Robert A.
Davis Cecil J.
Matthews Robert
Barndt B. Peter
Comfort James T.
Sharp Melvin
Texas Instruments Incorporated
Werner Frank E.
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