Integrated circuit processing

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Interconnecting plural devices on semiconductor substrate

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Details

438 10, 438 17, H01L 2100, H01L 2166, G01R 3126

Patent

active

060048271

ABSTRACT:
A variety of test structures may be fabricated with aluminum runners and overlying dielectrics. The dielectrics are removed and bumps are observed upon the aluminum runners. Unevenness in the bump distribution is a predictor of long term reliability problems. A test structure may be utilized to design integrated mass production fabrication processes.

REFERENCES:
patent: 3548491 (1970-12-01), Ainslie et al.

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