Semiconductor device manufacturing: process – Including control responsive to sensed condition – Interconnecting plural devices on semiconductor substrate
Patent
1997-09-03
1999-12-21
Dutton, Brian
Semiconductor device manufacturing: process
Including control responsive to sensed condition
Interconnecting plural devices on semiconductor substrate
438 10, 438 17, H01L 2100, H01L 2166, G01R 3126
Patent
active
060048271
ABSTRACT:
A variety of test structures may be fabricated with aluminum runners and overlying dielectrics. The dielectrics are removed and bumps are observed upon the aluminum runners. Unevenness in the bump distribution is a predictor of long term reliability problems. A test structure may be utilized to design integrated mass production fabrication processes.
REFERENCES:
patent: 3548491 (1970-12-01), Ainslie et al.
Dutton Brian
Francos William S.
Grillo Antony
Lucent Technologies - Inc.
Rehberg John T.
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