Integrated circuit process compatible surge protection resistor

Electrical transmission or interconnection systems – Nonlinear reactor systems – Parametrons

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357 40, 357 59, 357 51, 307315, H01L 2702, H01L 2904

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active

041330005

ABSTRACT:
A monolithic integrated circuit structure having an integral high value surge protection resistor of polycrystalline silicon on a thermally grown thick silicon dioxide plateau having no surface diffusion regions thereunder. The structure can be made by merely adding intermediate steps to existing integrated circuit processing. It is capable of absorbing transients of hundreds of volts.

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patent: 3566200 (1971-02-01), Seidler
patent: 3723833 (1973-03-01), Wheatley
patent: 3755722 (1973-08-01), Harland et al.
patent: 3792319 (1974-02-01), Tsang
patent: 3792384 (1974-02-01), Hunt
patent: 3864817 (1975-02-01), Lapham et al.
patent: 4001762 (1977-01-01), Aoki et al.

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