Integrated circuit process

Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal

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29577, 29580, 148174, 148191, 357 44, 357 49, 357 50, 357 59, 156600, H01L 2176, H01L 2904

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active

039545229

ABSTRACT:
In the manufacture of semiconductor components, more radiation tolerant semiconductors are accomplished by growing a uniform epitaxial collector region on a dielectrically isolated substrate having islands of high conductivity semiconductor material.

REFERENCES:
patent: 3454835 (1969-07-01), Rosvold
patent: 3587166 (1971-06-01), Alexander et al.
patent: 3725146 (1973-04-01), Roder
Wu, B. P. F., "Semiconductor Fabrication... of Integrated Circuits", I.B.M. Tech. Discl. Bull., Vol. 8, No. 12, May 1966, pp. 1846-1847.
Stern, E., "Planar Scanistor Arrays", Ibid., Vol. 7, No. 11, Apr. 1965, pp. 1101-1102.
Stern et al., "Fabrication of Planar... By Insulating Barriers", Ibid., Vol. 7, No. 11, Apr. 1965, p. 1103.
Thornton, C. G., "Metal Bathtubs in Microcircuits Reduce Collector Resistance", Electronic Equipment Engin. Dec. 1964, pp. 18-20.

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