Integrated circuit precision capacitor

Details Integrated circuit precision capacitor Integrated circuit precision capacitor

1985-08-19

1986-12-09

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

29 2542, H01G 410, H01G 700

Patent

active

046284052

ABSTRACT:
A refractory metal or a refractory metal silicide is applied to a monolithic IC where capacitors are desired and then covered with an amorphous silicon coating. The coating protects the capacitor metal or silicide during IC fabrication. The capacitor dielectric is created by oxidizing the protective coating, leaving the interface continuous and free of native oxides and trapping states. The result is a capacitor that has a very low voltage coefficient of capacitance.

REFERENCES:
patent: 3201667 (1965-08-01), Varga
patent: 3273033 (1966-09-01), Rossmeisl
patent: 3387952 (1968-06-01), La Chapelle
patent: 3470018 (1969-09-01), Smith et al.
patent: 3615981 (1971-10-01), Pratt et al.
patent: 3819990 (1974-06-01), Hayashi et al.
patent: 4335371 (1982-06-01), Connolly et al.

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