Integrated circuit manufacturing

Details Integrated circuit manufacturing Integrated circuit manufacturing

1994-03-18

1995-05-23

Powell, William

Etching a substrate: processes

Forming or treating electrical conductor article

216 83, 252 791, 252 794, 134 2, B44C 172, B29C 3700

Patent

active

054178029

ABSTRACT:
The addition of ligands for chelating Group I and Group II ions to organic solvents used for photoresist removal and etched conductor cleaning enhances the shelf life of these solvents. Furthermore, mobile ion contamination of integrated circuits processed with ligands modified organic solvents is reduced.

REFERENCES:
patent: 3813309 (1974-05-01), Bakos et al.
patent: 3871929 (1975-03-01), Schevey et al.

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