Integrated circuit interlevel conductor defect characterization

Details Integrated circuit interlevel conductor defect characterization Integrated circuit interlevel conductor defect characterization

1995-11-20

1997-09-23

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

3241581, 437 8, H01H 3102, G01R 3126, H01L 2166

Patent

active

056708831

ABSTRACT:
An interlevel conductor defect characterization integrated circuit test structure including first and second spaced test pads, a conductor layer, an insulator layer between the conductor layer and the test pads; and a first interlevel conductor having a unit cross-sectional conductive area extending between the first test pad and the conductor layer, and a second interlevel conductor extending between said second test pad and said conductor layer and having a cross-sectional conductive area substantially greater than the unit area for detecting defects which restrict the current carrying capacity of said unit area of the first interlevel conductor but not the second interlevel conductor.

REFERENCES:
patent: 3859711 (1975-01-01), McKiddy
patent: 4144493 (1979-03-01), Lee
patent: 4672314 (1987-06-01), Kokkas
patent: 4835466 (1989-05-01), Maly
patent: 5049811 (1991-09-01), Dreyer
patent: 5051690 (1991-09-01), Maly
patent: 5326428 (1994-07-01), Farnworth

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