Integrated circuit insulator

Details Integrated circuit insulator Integrated circuit insulator

1997-03-04

2000-11-21

Chen, Vivian

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

428421, 428448, 428450, 428472, 526242, 526250, 526251, 526252, 526253, 526254, B32B 2706, C08F 1418, C08F11418, C08F13616

Patent

active

061500100

ABSTRACT:
Intermetal level dielectrics comprise fluorinated polydimethylenenaphthalene derived from the following monomers wherein each of R.sub.1, R.sub.2, R.sub.3, and R.sub.4 is selected from the group consisting of H, F, and fluorocarbon groups ##STR1## The dielectric and oxides may be between metal lines. Fluorination of the polydimethylenenaphthalene lowers dielectric constant and increases working temperature.

REFERENCES:
patent: 5110903 (1992-05-01), Lee et al.
patent: 5210341 (1993-05-01), Dolbier, Jr. et al.
patent: 5536319 (1996-07-01), Wary et al.
patent: 5709753 (1998-01-01), Olson et al.

Affiliated with

Also associated with

Rating

Integrated circuit insulator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated circuit insulator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated circuit insulator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1254660