Integrated circuit including test portion and method for making

Details Integrated circuit including test portion and method for making Integrated circuit including test portion and method for making

1981-03-30

1983-11-01

Larkins, William D.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Frequency of cyclic current or voltage

324158T, 357 45, 357 48, 357 51, 357 85, H01L 2704

Patent

active

044132719

ABSTRACT:
A test circuit, including a vertical NPN, a lateral PNP and a vertical PNP transistor plus a diffused resistor and a thin film resistor, is formed by altogether simultaneous steps with corresponding components of each principal integrated circuit. Four dedicated test pads in each integrated circuit lead to all bases, collectors, emitters and resistor extremities so as to permit substantially unshunted measurements of all basic transistor and resistor electrical parameters.

REFERENCES:
patent: 3304594 (1967-02-01), Madland
patent: 3465427 (1969-09-01), Barson
patent: 3507036 (1970-04-01), Antipov
patent: 3774088 (1973-11-01), Magdo et al.
patent: 3808475 (1974-04-01), Buelow et al.
patent: 3849872 (1974-11-01), Hubacher
patent: 4225877 (1980-09-01), Miles
patent: 4243937 (1981-01-01), Multani et al.
Adapting Process Test Patterns to High-Reduction Projection Printers, Steven Wetterling, Proceedings of 2nd Custom Integrated Circuits Conference (held May 19-21, 1980), pp. 94-97.

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