Integrated circuit having laser-alterable metallization layer

Fishing – trapping – and vermin destroying

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427 531, 437173, 437174, 437193, H01L 21265

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active

048493635

ABSTRACT:
An integrated circuit and a method of altering such an integrated circuit (e.g., during final testing of the circuit) are disclosed. The method can be used to program a circuit, wire around defective portions of a circuit, or otherwise permanently alter a circuit by employing a directed energy source such as a laser to sever electrical paths in an upper layer of metallization in an integrated circuit. The integrated circuit comprises a laminated upper metallization layer, the upper layer(s) of which laminate are removed from the laser-alterable lower layer at selected locations in the metallization layer to provide laser-alteration sites in the circuit. In a preferred embodiment, the upper metallization layer comprises a two-layer laminate including an upper, relatively thick layer of an aluminum/silicon alloy and a lower, relatively thin layer of titanium nitride.

REFERENCES:
patent: 4259367 (1981-03-01), Dougherty, Jr.
patent: 4617723 (1986-10-01), Mukai
patent: 4636404 (1987-01-01), Raffel et al.
patent: 4665295 (1987-05-01), McDavid
patent: 4720470 (1988-01-01), Johnson
patent: 4751197 (1988-06-01), Wills
patent: 4758533 (1988-07-01), Magee et al.

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