Integrated circuit having integral decoupling capacitor

Details Integrated circuit having integral decoupling capacitor Integrated circuit having integral decoupling capacitor

1996-02-13

1999-02-16

Kincaid, Kristine

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613212, 257528, 257532, H01G 406

Patent

active

058726977

ABSTRACT:
The present invention is a decoupling capacitor for an integrated circuit. The integrated circuit has a final metal layer which includes a power bus. The decoupling capacitor includes a dielectric film disposed over the final metal layer and a conductive film disposed over the dielectric layer, whereby capacitance may be provided in the dielectric layer.

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IBM.TM. Technical Disclosure Bulletin, vol. 34, No. 8, Jan. 1992, Dhong et al., "Method of Increasing On-Chip VDD Decoupling Capacitance Using a Shielded Micro-Strip Structure", pp. 59-60.
IBM.TM. Technical Disclosure Bulletin, vol. 37, No. 10., Oct. 1994, Beach et al., "High Dielectric Constent On-Chip Decoupling Capacitor Incorporated into BEOL Fabrication Process," p. 413.
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