Integrated circuit fuse

Details Integrated circuit fuse Integrated circuit fuse

1979-10-18

1981-06-09

Beha, Jr., William H.

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

Fusible element actuated

H01H 8510

Patent

active

042727537

ABSTRACT:
Fuses and interconnects are fabricated by applying a metallic layer on a substrate and a fusible layer on the metallic layer. Portions of the fusible layer are removed to define discrete fuse elements having a necked portion. Portions of the metallic layer are removed to define interconnects. A portion of the metallic layer coextensive with the necked portion of the fuse elements is removed by selective side etching to form tapering portions separated by a gap without etching of the interconnects. The interconnects are protected from side etching by a separate mask layer or a mask layer used to form the interconnects may be heated to flow down over the sides of the interconnects.

REFERENCES:
patent: 597969 (1898-01-01), Ferguson
patent: 3676742 (1972-07-01), Russell et al.
patent: 3883838 (1975-05-01), Bogert et al.
patent: 4032949 (1977-06-01), Bierig
patent: 4089734 (1978-05-01), Bierig

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