Integrated circuit for measuring mask misalignment

Details Integrated circuit for measuring mask misalignment Integrated circuit for measuring mask misalignment

1984-10-05

1987-03-03

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

33 1D, 33533, 148DIG102, 324 65R, G01B 700, G01R 2714, H01L 2166

Patent

active

046478507

ABSTRACT:
An integrated circuit for measuring conductor misalignment comprises: a set of 2n+1 conductor pairs where n is a predetermined positive integer; each conductor pair includes a U-shaped conductor having a central axis; each conductor pair also includes a rectangular shaped conductor having a central axis and which is narrow enough to fit between the legs of the U-shaped conductor provided their central axis are aligned; and the rectangular shaped conductor of each conductor pair has its central axis a distance .delta.+k.DELTA.d from the central axis of the U-shaped conductor where .DELTA.d is a fixed increment, k is an integer between +n and -n that differs for each conductor pair, and .delta.is a misalignment between the central axis of each conductor pair.

REFERENCES:
patent: 4538105 (1985-08-01), Ausschnitt
patent: 4566193 (1986-01-01), Hackleman et al.
patent: 4571538 (1986-02-01), Chow
IBM Technical Disclosure Bulletin, Genin, D. et al., "Incremental Structure for Electrical Determination of Mask Alignment", vol. 18, No. 11, Apr. 1976 pp. 3631-3632.
Buehler, M. "Comprehensive Test Patterns with Modular Test Structures: . . . ", Solid State Technology, Oct. 1979, pp. 89-94.
Henderson, B. et al., "Integrated Circuit Test Structure which Uses a Vernier . . . ", Electronics Letters, Oct. 12, 1983, vol. 10, No. 21, pp. 868-869.

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