Integrated circuit dielectrics

Details Integrated circuit dielectrics Integrated circuit dielectrics

1997-12-17

2000-05-09

Marquis, Melvyn I.

Firearms

428446, 428447, 428620, 257914, 252 632R, 252 623Q, 252 623BT, B05D 302

Patent

active

060595531

ABSTRACT:
An integrated circuit with an intermetal level dielectric (IMD) including an organic-silica hybrid (110) and located between metal lines (104).

REFERENCES:
patent: 4349606 (1982-09-01), Kishimoto et al.
patent: 4652894 (1987-03-01), Potember et al.

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