Integrated circuit device and process for its manufacture

Details Integrated circuit device and process for its manufacture Integrated circuit device and process for its manufacture

1996-10-28

1999-10-05

Nakarani, D. S.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

428450, 428458, 4284735, 428901, B32B 310, B32B 1508

Patent

active

059621133

ABSTRACT:
The invention relates to an integrated circuit device comprising (i) a substrate; (ii) metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises the reaction product of an organic polysilica and polyamic ester preferably terminated with an alkoxysilyl alkyl group.

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