Integrated circuit device and process for its manufacture

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From carboxylic acid or derivative thereof

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528170, 528322, 528332, 528503, 427 96, 4273855, 427402, 437174, 437915, 357 40, 357 59R, 357 68, 357 71P, 174250, 174258, 174262, 174263, 174264, 174265, 174266, 174268, C08G 7310, C08G 6914, B05D 512

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058832190

ABSTRACT:
The invention relates to an integrated circuit device comprising (i) a substrate, (ii) metallic circuit lines positioned on the substrate, and (iii) a porous dielectric material positioned on the circuit lines. The dielectric material comprises the reaction product of an organic polysilica and polyamic ester preferably terminated with an alkoxysilyl alkyl group.

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