Integrated circuit device

Details Integrated circuit device Integrated circuit device

1994-02-07

1996-03-26

Hoang, Tu

Electrical resistors

With base extending along resistance element

Resistance element coated on base

338311, 174253, H01C 1012

Patent

active

055024319

ABSTRACT:
An integrated circuit device includes a first insulation layer formed on a substrate; a second insulation layer formed above the first insulation layer; a thin-film resistor formed on the second insulation layer; a third insulation layer in covering relation to the thin-film resistor and the second insulating layer; first contact holes penetrating the third insulation layer in association with the thin-film resistor; second contact holes penetrating through the second and third insulation layers; and conductive layers for electromagnetically shielding the thin-film resistor, the conductive layers including a first conductive layer formed between the first and second insulation layers below the thin-film resistor and a wiring layers formed above the thin-film resistor within the first and second contact holes.

REFERENCES:
patent: 3663224 (1972-05-01), Hallman et al.
patent: 5270493 (1993-12-01), Inoue et al.

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