Integrated circuit defect analysis using liquid crystal

Details Integrated circuit defect analysis using liquid crystal Integrated circuit defect analysis using liquid crystal

2005-10-18

2005-10-18

Tokar, Michael (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120, C324S760020, C324S701000, C374S161000

Reexamination Certificate

active

06956385

ABSTRACT:
Defect analysis of an integrated circuit die having a back side opposite circuitry at a circuit side and a liquid crystal liquid is enhanced using near infrared (nIR) laser light. According to an example embodiment of the present invention, nIR laser light is directed to an integrated circuit die having a liquid crystal layer formed over the die. When the die includes a defect that generates heat, the heat generated in the die as a result of the nIR laser light adds to the heat in the die generated as a result of the defect and causes a portion of the liquid crystal layer to change phase near the defect. The phase change is detected and used to identify a portion of the die having a defect.

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patent: 3934199 (1976-01-01), Channin
patent: 5576630 (1996-11-01), Fujita
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patent: 6146014 (2000-11-01), Bruce et al.
patent: 6169408 (2001-01-01), Kantor et al.
patent: 6488405 (2002-12-01), Eppes et al.

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