Integrated circuit chips and wafers including on-chip test...

Details Integrated circuit chips and wafers including on-chip test... Integrated circuit chips and wafers including on-chip test...

2007-12-11

2007-12-11

Pert, Evan (Department: 2826)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C438S018000, C257S048000, C257SE25004, C324S754090

Reexamination Certificate

active

10365143

ABSTRACT:
Integrated circuit chips include an internal circuit including interconnected semiconductor devices that are configured to provide integrated circuit functionality, and a Test Element Group (TEG) circuit that is configured to allow measuring of electrical characteristics of the semiconductor devices. By providing a TEG circuit in the same integrated circuit chip as the internal circuit, the TEG circuit may accurately represent the electrical characteristics of the interconnected semiconductor devices of the internal circuit of the associated integrated circuit chip. The integrated circuit chip may be coupled to a test apparatus. The test apparatus includes a test probe that is configured to simultaneously contact the internal circuit and the TEG circuit. The test apparatus also can simultaneously test the integrated circuit functionality of the internal circuit, and measure the electrical characteristics of the semiconductor devices via the TEG circuit.

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English translation of the First Office Action from the Chinese Patent Office for Chinese Patent Application No. 03131477.5; May 28, 2006.

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