Wave transmission lines and networks – Automatically controlled systems – With control of equalizer and/or delay network
Patent
1980-06-16
1983-04-05
Larkins, William D.
Wave transmission lines and networks
Automatically controlled systems
With control of equalizer and/or delay network
357 40, 357 55, 357 65, 357 71, 333236, 333238, H01L 2704
Patent
active
043793070
ABSTRACT:
The invention includes methods and apparatus for providing relatively long conductors on integrated chips with substantially reduced RC time constants. The preferred mode utilizes a substrate having a metallization pattern wherein etching or milling into the substrate creates a cavity with a metallization conductor disposed in the mouth of the cavity, said cavity being metallized to provide the second conductor. A similar structure may be formed by utilizing orientation dependent etchant which attacks the (111) surface much quicker than the (100) surface to provide an etched V-shaped cavity wherein the first conductor is still an elongated metallization segment in the mouth of the V, and the V is metallized to provide the second conductor. Also, a single conductor, such as the elongated metallization strip may be extended to a conductor on the reverse side of the substrate by providing a pyramid shaped hole from the first conductor through the substrate, which hole is metallized to extend the first conductor to the second conductor via the hole in the substrate.
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Caldwell Wilfred G.
Hamann H. Fredrick
Larkins William D.
Rockwell International Corporation
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