Integrated circuit chip having isolation trenches composed of a

Details Integrated circuit chip having isolation trenches composed of a Integrated circuit chip having isolation trenches composed of a

1996-07-30

1998-02-24

Thomas, Tom

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including high voltage or high power devices isolated from...

257500, 257506, 257510, 257513, 257374, 257397, 257392, H01L 2976, H01L 2900

Patent

active

057214484

ABSTRACT:
An integrated circuit with FETs having an essentially uniform gate oxide thickness and FETs having gate oxide thickness enhanced along the sides. FETs with enhanced gate oxide have an ONO layer diffused with potassium in close proximity to the enhanced (thicker) oxide, and, as a result, have a slightly higher V.sub.t and much more attenuated soft turn on.

REFERENCES:
patent: 4356211 (1982-10-01), Riseman
patent: 4420874 (1983-12-01), Funatsu
patent: 4623437 (1986-11-01), Visca et al.
patent: 4986878 (1991-01-01), Malazgirt et al.
patent: 5072269 (1991-12-01), Hieda
patent: 5075248 (1991-12-01), Yoon et al.
patent: 5078801 (1992-01-01), Malik
patent: 5217919 (1993-06-01), Gaul et al.
patent: 5240875 (1993-08-01), Tsou
patent: 5292679 (1994-03-01), Anzai
patent: 5313419 (1994-05-01), Chang
patent: 5316965 (1994-05-01), Philipossian et al.
patent: 5327374 (1994-07-01), Krautschneider et al.
patent: 5358894 (1994-10-01), Fazan et al.
patent: 5397725 (1995-03-01), Wolstenholm et al.
patent: 5422294 (1995-06-01), Noble, Jr.
patent: 5448090 (1995-09-01), Geissler et al.
patent: 5489544 (1996-02-01), Rajeevakumar
patent: 5502321 (1996-03-01), Matsushita
patent: 5536675 (1996-07-01), Bohr

Affiliated with

Also associated with

Rating

Integrated circuit chip having isolation trenches composed of a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated circuit chip having isolation trenches composed of a , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated circuit chip having isolation trenches composed of a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1876773