Integrated circuit capacitor having a conductive trench

Details Integrated circuit capacitor having a conductive trench Integrated circuit capacitor having a conductive trench

1995-03-27

1996-11-12

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613212, 252301, H01G 406, H01L 27108

Patent

active

055746217

ABSTRACT:
A capacitor (58) for an integrated circuit having a conductive trench (50), disposed below a bottom electrode layer (52), that electrically connects the bottom electrode layer to a semiconductor substrate (14, 16). The conductive trench eliminates the need for a top-side contact to the bottom electrode layer. The semiconductor substrate is, for example, connected to ground.

REFERENCES:
patent: 5181089 (1993-01-01), Matsuo et al.
patent: 5187550 (1993-02-01), Yanagisawa
patent: 5428236 (1995-06-01), Uchida
patent: 5442584 (1995-08-01), Jeong et al.

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